Facilities
Key Technological platforms
· VLSI and SoC design; pilot manufacturing.
· Giant magnetoresistance effect NEMS sensors. Main applications: nonvolatile memory (NVRAM), terahertz range microgenerators, magnetic field and biosensors.
· Piezoresistive effect NEMS sensors. Main applications: sensitive elements for pressure and vibration sensors.
· Thermoresistive effect NEMS sensors. Main applications: sensitive elements for gas and liquids flow rate detectors and mixture analyzers.
· CMOS microchips with integrated Intelligent sensors. Main applications: signal digitizing and preprocessing.
· NEMS and MEMS gyroscopes. Main applications: accelerometers and navigation systems.
· Micro mirror matrixes.
· Multifunctional nano-probe console systems.
· Non-invasive sensors systems of automobile electronics.